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Delay Vacuum Solenoid Valve (HVL)


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NO solenoid valve for vacuum chamber atmospheric release control. Off-delay function protects the vacuum chamber from contamination due to oil rise during power failures.

Features:

  • Off-delay setting of up to 8 seconds (AC voltage) and 10 seconds (DC voltage) is possible.
  • Vacuum leakage rate 1.0 x 10^-9 Pa・㎥/s or less.
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